Optical Inspection of Microsystems, Second Edition

Discover the cutting-edge advancements in optical metrology with Optical Inspection of Microsystems, Second Edition by Wolfgang Osten. Published by Taylor & Francis Inc in 2019, this comprehensive hardback edition spans 570 pages and serves as an essential resource for professionals in industrial microscopy and microelectromechanical systems (MEMS).

This updated edition offers a thorough exploration of the most significant and widely utilized full-field optical inspection technologies. Dive into detailed techniques including interference microscopy, laser Doppler vibrometry, holography, speckle metrology, spectroscopy, deflectrometry, and digital holographic microscopy. Each method is presented with clarity, making it an invaluable guide for quality control and optical measurements in various applications.

Whether you're a researcher, engineer, or student, this book equips you with the knowledge to enhance your understanding and implementation of optical inspection methods in microsystems.