{"product_id":"tribology-in-chemical-mechanical-planarization-taylor-francis-inc-9780824725679-hong-liang","title":"Tribology In Chemical-Mechanical Planarization","description":"\u003cp\u003eThe role that friction and contact play in the processes of wear and planarization on material surfaces is central to the understanding of Chemical-Mechanical planarization technology. This book offers an examination of tribological principles and their applications in CMP, including integrated circuits and basic concepts in surfaces of contacts.\u003c\/p\u003e","brand":"Hong Liang","offers":[{"title":"Default Title","offer_id":52225590362454,"sku":"9780824725679","price":284.94,"currency_code":"EUR","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0886\/3206\/6390\/files\/9780824725679.jpg?v=1767739278","url":"https:\/\/www.englishbook.fi\/products\/tribology-in-chemical-mechanical-planarization-taylor-francis-inc-9780824725679-hong-liang","provider":"Bookshop","version":"1.0","type":"link"}