{"product_id":"silicon-wet-bulk-micromachining-for-mems-pan-stanford-publishing-pte-ltd-9789814613729-prem-pal","title":"Silicon Wet Bulk Micromachining for MEMS","description":"\u003cp\u003e\u003cstrong\u003eSilicon Wet Bulk Micromachining for MEMS\u003c\/strong\u003e by Prem Pal, Kazuo Sato.\u003c\/p\u003e\n\u003cp\u003ePublished by Taylor \u0026amp; Francis Group, (2017), Hardback, 424 pages.\u003c\/p\u003e\n\u003cp\u003eTopics: Machining, Microelectromechanical systems, Micromachining, TECHNOLOGY \u0026amp; ENGINEERING.\u003c\/p\u003e","brand":"Prem Pal","offers":[{"title":"Default Title","offer_id":52228858610006,"sku":"9789814613729","price":120.03,"currency_code":"EUR","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0886\/3206\/6390\/files\/9789814613729.jpg?v=1767743957","url":"https:\/\/www.englishbook.fi\/products\/silicon-wet-bulk-micromachining-for-mems-pan-stanford-publishing-pte-ltd-9789814613729-prem-pal","provider":"Bookshop","version":"1.0","type":"link"}