{"product_id":"atomic-layer-processing-wiley-vch-verlag-gmbh-9783527346684-semiconductor-dry-etching-technology-thorsten-lill","title":"Atomic Layer Processing","description":"\u003cp\u003e\u003cstrong\u003eAtomic Layer Processing\u003c\/strong\u003e by Thorsten Lill.\u003c\/p\u003e\n\u003cp\u003ePublished by Wiley \u0026amp; Sons, Limited, John, (2021), Paperback, 304 pages.\u003c\/p\u003e\n\u003cp\u003eTopics: Engineering.\u003c\/p\u003e","brand":"Thorsten Lill","offers":[{"title":"Default Title","offer_id":52251559625046,"sku":"9783527346684","price":134.25,"currency_code":"EUR","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0886\/3206\/6390\/files\/9783527346684.jpg?v=1767779151","url":"https:\/\/www.englishbook.fi\/products\/atomic-layer-processing-wiley-vch-verlag-gmbh-9783527346684-semiconductor-dry-etching-technology-thorsten-lill","provider":"Bookshop","version":"1.0","type":"link"}